Miko C Elwenspoek: search on Z-Library

The world's largest scientific articles store. 70,000,000+ articles for free.

Don't use scam websites

1

Micro-liquid flow sensor

Theo S.J. Lammerink, Niels R. Tas, Miko Elwenspoek, Jan H.J. Fluitman

Journal:

Sensors and Actuators A: Physical

Year:

1993

Language:

english

File:

PDF, 985 KB

english, 1993

2

[IEEE 2010 IEEE Nanotechnology Materials and Devices Conference (NMDC 2010) - Monterey, CA (2010.10.12-2010.10.15)] 2010 IEEE Nanotechnology Materials and Devices Conference - Silicon nanowire fabrication using edge and corner lithography

Yagubizade, Hadi, Berenschot, Erwin, Jansen, Henri V, Elwenspoek, Miko, Tas, N R

Year:

2010

Language:

english

File:

PDF, 1.88 MB

english, 2010

3

Resonating microbridge mass flow sensor

Siebe Bouwstra, Rob Legtenberg, Harrie A.C. Tilmans, Miko Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 586 KB

english, 1990

4

Compositional Dependence of the Young’s Modulus and Piezoelectric Coefficient of (110)-Oriented Pulsed Laser Deposited PZT Thin Films

Nazeer, Hammad, Nguyen, Minh D., Sukas, Ozlem Sardan, Rijnders, Guus, Abelmann, Leon, Elwenspoek, Miko C.

Journal:

Journal of Microelectromechanical Systems

Year:

2015

Language:

english

File:

PDF, 3.79 MB

english, 2015

5

The black silicon method II:The effect of mask material and loading on the reactive ion etching of deep silicon trenches

Henri Jansen, Meint de Boer, Johannes Burger, Rob Legtenberg, Miko Elwenspoek

Journal:

Microelectronic Engineering

Year:

1995

Language:

english

File:

PDF, 1.73 MB

english, 1995

6

In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators

Siebe Bouwstra, Eddy de Weerd, Miko Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 557 KB

english, 1990

7

A differential resonator design using a bossed structure for applications in mechanical sensors

Harrie A.C. Tilmans, Siebe Bouwstra, Dominicus J. Ijntema, Miko Elwenspoek, Carl F. Klein

Journal:

Sensors and Actuators A: Physical

Year:

1991

Language:

english

File:

PDF, 747 KB

english, 1991

8

Frequency dependence of thermal excitation of micromechanical resonators

Theo S.J. Lammerink, Miko Elwenspoek, Jan H.J. Fluitman

Journal:

Sensors and Actuators A: Physical

Year:

1991

Language:

english

File:

PDF, 377 KB

english, 1991

9

Q-factor and frequency shift of resonating silicon diaphragms in air

Albert Prak, Frans R. Blom, Miko Elwenspoek, Theo S.J. Lammerink

Journal:

Sensors and Actuators A: Physical

Year:

1991

Language:

english

File:

PDF, 591 KB

english, 1991

10

Micro resonant force gauges

Harrie A.C. Tilmans, Miko Elwenspoek, Jan H.J. Fluitman

Journal:

Sensors and Actuators A: Physical

Year:

1992

Language:

english

File:

PDF, 1.86 MB

english, 1992

11

Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

Rob Legtenberg, Harrie A.C. Tilmans, Job Elders, Miko Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

1994

Language:

english

File:

PDF, 1.24 MB

english, 1994

12

The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source

Henri Jansen, Meint de Boer, Henk Wensink, Ben Kloeck, Miko Elwenspoek

Journal:

Microelectronics Journal

Year:

2001

Language:

english

File:

PDF, 433 KB

english, 2001

13

A closer look at the ductile–brittle transition in solid particle erosion

Henk Wensink, Miko C. Elwenspoek

Journal:

Year:

2002

Language:

english

File:

PDF, 542 KB

english, 2002

14

Reduction of sidewall inclination and blast lag of powder blasted channels

Henk Wensink, Miko C Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 409 KB

english, 2002

15

Heat transfer in a MEMS for microfluidics

Nicolae Damean, Paul P.L. Regtien, Miko Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 530 KB

english, 2003

16

The μ-flown: a novel device for measuring acoustic flows

Hans-Elias de Bree, Peter Leussink, Twan Korthorst, Henri Jansen, Theo S.J Lammerink, Miko Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 307 KB

english, 1996

17

Modeling, design and testing of the electrostatic shuffle motor

Niels Tas, Jeroen Wissink, Louis Sander, Theo Lammerink, Miko Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 952 KB

english, 1998

18

Low creep and hysteresis load cell based on a force-to-fluid pressure transformation

Robert A.F. Zwijze, Remco J. Wiegerink, Gijs J.M. Krijnen, Theo S.J. Lammerink, Miko Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 704 KB

english, 1999

19

Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

Remco Wiegerink, Robert Zwijze, Gijs Krijnen, Theo Lammerink, Miko Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 2.12 MB

english, 2000

20

Surface Devitrification and the Growth of Cristobalite in Borofloat® (Borosilicate 8330) Glass

Berker Moğulkoç, Kevin M. Knowles, Henri V. Jansen, H. J. Marcel Ter Brake, Miko C. Elwenspoek

Journal:

Journal of the American Ceramic Society

Year:

2010

Language:

english

File:

PDF, 1.27 MB

english, 2010

21

Homoepitaxial Branching: An Unusual Polymorph of Zinc Oxide Derived from Seeded Solution Growth

Kozhummal, Rajeevan, Yang, Yang, Güder, Firat, Hartel, Andreas, Lu, Xiaoli, Küçükbayrak, Umut M., Mateo-Alonso, Aurelio, Elwenspoek, Miko, Zacharias, Margit

Journal:

Year:

2012

Language:

english

File:

PDF, 1.22 MB

english, 2012

22

3D Nanofabrication: 3D Nanofabrication of Fluidic Components by Corner Lithography (Small 24/2012)

Berenschot, Erwin J. W., Burouni, Narges, Schurink, Bart, van Honschoten, Joost W., Sanders, Remco G. P., Truckenmuller, Roman, Jansen, Henri V., Elwenspoek, Miko C., van Apeldoorn, Aart A., Tas, Niel

Journal:

Year:

2012

File:

PDF, 5.95 MB

2012

23

Thermal Flow-Sensor Drift Reduction by Thermopile Voltage Cancellation via Power Feedback Control

Dijkstra, Marcel, Lammerink, Theo S. J., de Boer, Meint J., Berenschot, Erwin J. W., Wiegerink, Remco J., Elwenspoek, Miko

Journal:

Journal of Microelectromechanical Systems

Year:

2014

Language:

english

File:

PDF, 1.44 MB

english, 2014

24

Integrated Lithographic Molding for Microneedle-Based Devices

Luttge, Regina, Berenschot, Erwin J. W., de Boer, Meint J., Altpeter, Dominique M., Vrouwe, Elwin X., van den Berg, Albert, Elwenspoek, Miko

Journal:

Journal of Microelectromechanical Systems

Year:

2007

Language:

english

File:

PDF, 1.16 MB

english, 2007

25

Self-Assembled Three-Dimensional Non-Volatile Memories

Abelmann, Leon, Tas, Niels, Berenschot, Erwin, Elwenspoek, Miko

Journal:

Year:

2010

Language:

english

File:

PDF, 3.14 MB

english, 2010

26

Micromachines – An Open Access Journal on Microelectromechanical Systems (MEMS)

Elwenspoek, Miko

Journal:

Year:

2010

Language:

english

File:

PDF, 66 KB

english, 2010

27

Development of arrays of transition edge sensors for application in X-ray astronomy

Marcel P. Bruijn, Wouter M.Bergmann Tiest, Henk F.C. Hoevers, Eric Krouwer, Jan van der Kuur, Marcel L. Ridder, Zakaria Moktadir, Remco Wiegerink, Dick van Gelder, Miko Elwenspoek

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2003

Language:

english

File:

PDF, 161 KB

english, 2003

28

Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications

Yiping Zhao, Erwin Berenschot, Henri Jansen, Niels Tas, Jurriaan Huskens, Miko Elwenspoek

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 330 KB

english, 2009

29

RIE lag in high aspect ratio trench etching of silicon

Henri Jansen, Meint de Boer, Remco Wiegerink, Niels Tas, Edwin Smulders, Christina Neagu, Miko Elwenspoek

Journal:

Microelectronic Engineering

Year:

1997

Language:

english

File:

PDF, 552 KB

english, 1997

30

Filtration of lager beer with microsieves: flux, permeate haze and in-line microscope observations

Stein Kuiper, Cees van Rijn, Wietze Nijdam, Onno Raspe, Henk van Wolferen, Gijs Krijnen, Miko Elwenspoek

Journal:

Journal of Membrane Science

Year:

2002

Language:

english

File:

PDF, 713 KB

english, 2002

31

Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach

Roald M Tiggelaar, Theo T Veenstra, Remco G.P Sanders, Erwin Berenschot, Han Gardeniers, Miko Elwenspoek, Albert Prak, Richard Mateman, Jeroen M Wissink, Albert van den Berg

Journal:

Sensors and Actuators B: Chemical

Year:

2003

Language:

english

File:

PDF, 460 KB

english, 2003

32

The electrolysis of water: an actuation principle for MEMS with a big opportunity

Cristina Neagu, Henri Jansen, Han Gardeniers, Miko Elwenspoek

Journal:

Year:

2000

Language:

english

File:

PDF, 512 KB

english, 2000

33

Fabrication of micron-sized tetrahedra by Si〈1 1 1〉 micromachining and retraction edge lithography

Kozhummal, Rajeevan, Berenschot, Erwin, Jansen, Henri, Tas, Niels, Zacharias, Margit, Elwenspoek, Miko

Journal:

Journal of Micromechanics and Microengineering

Year:

2012

Language:

english

File:

PDF, 1.52 MB

english, 2012

34

Silicon Nitride Nanosieve Membrane

Gadgil, Vishwas J., Bostan, Cazimir G., Berenschot, Erwin, van Rijn, Cees J. M., Elwenspoek, Miko, Tong, Hien D., Jansen, Henri V.

Journal:

Year:

2004

Language:

english

File:

PDF, 209 KB

english, 2004

35

3D Nanofabrication of Fluidic Components by Corner Lithography

Erwin J. W. Berenschot, Narges Burouni, Bart Schurink, Joost W. van Honschoten, Remco G. P. Sanders, Roman Truckenmuller, Henri V. Jansen, Miko C. Elwenspoek, Aart A. van Apeldoorn, Niels R. Tas

Journal:

Year:

2012

Language:

english

File:

PDF, 4.15 MB

english, 2012

36

[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - 3D-nanomachining using corner lithography

Berenschot, Erwin, Tas, Niels R., Jansen, Henri V., Elwenspoek, Miko

Year:

2008

Language:

english

File:

PDF, 255 KB

english, 2008

37

Wafer-scale fabrication of nanoapertures using corner lithography

Burouni, Narges, Berenschot, Erwin, Elwenspoek, Miko, Sarajlic, Edin, Leussink, Pele, Jansen, Henri, Tas, Niels

Journal:

Year:

2013

Language:

english

File:

PDF, 2.28 MB

english, 2013

38

[Microtechnology and MEMS] Mechanical Microsensors || Silicon Micromachining

Elwenspoek, Miko, Wiegerink, Remco

Year:

2001

Language:

english

File:

PDF, 2.93 MB

english, 2001

39

Transient nanobubbles in short-time electrolysis

Svetovoy, Vitaly B, Sanders, Remco G P, Elwenspoek, Miko C

Journal:

Journal of Physics Condensed Matter

Year:

2013

Language:

english

File:

PDF, 2.32 MB

english, 2013

40

Combustion of hydrogen-oxygen mixture in electrochemically generated nanobubbles

Svetovoy, Vitaly B., Sanders, Remko G. P., Lammerink, Theo S. J., Elwenspoek, Miko C.

Journal:

Physical Review E

Year:

2011

Language:

english

File:

PDF, 520 KB

english, 2011

41

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Optimized comb drive finger shape for shock-resistant actuation

Engelen, Johan B.C., Abelmann, Leon, Elwenspoek, Miko C.

Year:

2010

Language:

english

File:

PDF, 1.54 MB

english, 2010

42

[Microtechnology and MEMS] Mechanical Microsensors || Flow Sensors

Elwenspoek, Miko, Wiegerink, Remco

Year:

2001

Language:

english

File:

PDF, 4.49 MB

english, 2001

43

Capillary filling of sub-10 nm nanochannels

Haneveld, Jeroen, Tas, Niels R., Brunets, Nataliya, Jansen, Henri V., Elwenspoek, Miko

Journal:

Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 497 KB

english, 2008

44

Stiction in surface micromachining

Tas, Niels, Sonnenberg, Tonny, Jansen, Henri, Legtenberg, Rob, Elwenspoek, Miko

Journal:

Journal of Micromechanics and Microengineering

Year:

1996

Language:

english

File:

PDF, 592 KB

english, 1996

45

Nanopositioner actuator energy cost and performance

Engelen, Johan B.C., Khatib, Mohammed G., Abelmann, Leon, Elwenspoek, Miko C.

Journal:

Sensors and Actuators A: Physical

Year:

2013

Language:

english

File:

PDF, 1.03 MB

english, 2013

46

A survey on the reactive ion etching of silicon in microtechnology

Jansen, Henri, Gardeniers, Han, Boer, Meint de, Elwenspoek, Miko, Fluitman, Jan

Journal:

Journal of Micromechanics and Microengineering

Year:

1996

Language:

english

File:

PDF, 1.47 MB

english, 1996

47

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - A UHF 4th-order band-pass filter based on contour-mode PZT-on-Silicon resonators

Yagubizade, Hadi, Darvishi, Milad, Elwenspoek, Miko C., Tas, Niels R.

Year:

2014

Language:

english

File:

PDF, 1.49 MB

english, 2014

48

Piezoresistive friction force sensor for tribological research

Burger, Johannes, Berenschot, Erwin, Burger, Gert-Jan, Visscher, Harm, Elwenspoek, Miko

Journal:

Journal of Micromechanics and Microengineering

Year:

1998

Language:

english

File:

PDF, 245 KB

english, 1998

49

Stepper Motor Actuated Microvalve

Fazal, Imran, Louwerse, Marcus, Jansen, Henri, Elwenspoek, Miko

Journal:

Journal of Physics Conference Series

Year:

2006

Language:

english

File:

PDF, 266 KB

english, 2006

50

MEMS within a Swagelok®: a new platform for microfluidic devices

Unnikrishnan, Sandeep, Jansen, Henri, Berenschot, Erwin, Mogulkoc, Berker, Elwenspoek, Miko

Journal:

Year:

2009

Language:

english

File:

PDF, 9.61 MB

english, 2009

To build up a library is to create a life. It’s never just a random collection of books.

— Carlos María Domínguez

Official channel

Z-Library Desktop Launcher

Z-Library Since 2009 support@z-lib.do

EnglishРусскийEspañolItalianoελληνικάاللغة العربيةBahasa IndonesiaBahasa Malaysiaहिन्दीDeutschFrançaisPortuguêsУкраїнськаPolski中文繁體中文日本語Tiếng ViệtAzərbaycan DiliՀայոց լեզուภาษาไทยTürk Diliქართველიবাংলাپښتوతెలుగుاردو한국어SrpskiБългарски